Proceedings of JSPE Semestrial Meeting
2011 JSPE Spring Conference
Session ID : L36
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Host: The Japan Society for Precision Engineering

Built-in Displacement Sensor for Electrostatic Levitation Using High Frequency Superposition
*Yusuke Kobayashi, Akio Yamamoto, Toshiro Higuchi
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Keywords: built-in displacement sensor, electrostatic levitation, PD control
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[in Japanese]
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© 2011 The Japan Society for Precision Engineering
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