2011 JSPE Spring Conference
Session ID : N03
Conference information
Host: The Japan Society for Precision Engineering
Development of High-Quality and High-Throughput Micro-Hole Processing Using Hollow Microneedle Array (2nd Report)
Fabrication of Ni Microneedle Array as Imprint Tool
*Satoshi Yukizono, Jumpei Yoshida, Moeto Nagai, Takahiro Kawashima, Takayuki Shibata, Toshio Kubota, Mamoru Mita
Author information
Keywords:
Micro-hole processing,
Thermal imprinting process,
Polymer through holes,
Hollow microneedle array,
MEMS
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