Proceedings of JSPE Semestrial Meeting
2012 JSPE Autumn Conference
Session ID : K19
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Host: The Japan Society for Precision Engineering

First-Principles Study on Chemical Mechanical Polishing Properties of Perovskite Oxide Abrasive Grain
*Nobuki Ozawa, Miho Nakamura, Kentaro Kawaguchi, Takeshi Ishikawa, Yuji Higuchi, Momoji Kubo
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Keywords: First-principles calculation, Chemical mechanical polishing, Perovskite oxide
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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