Proceedings of JSPE Semestrial Meeting
2012 JSPE Autumn Conference
Session ID : K31
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Host: The Japan Society for Precision Engineering

A Miniature Fuel Cell with Monolithic Si Based Electrodes
Removal of Porous Si by Plasma Etching
*Masahiro Kobayashi, Ryoichi Teranishi, Masanori Hayase
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Keywords: Fuel Cell, Porous Si, Plasma Etching
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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