2012 JSPE Autumn Conference
Session ID : A68
Conference information
Host: The Japan Society for Precision Engineering
Evaluation for In-Plane Micro-Deformation Distribution Characteristics of Polishing Pad Surface
Michio Uneda, *Tatsunori Omote, Kazutaka Shibuya, Yoshio Nakamura, Daizo Ichikawa, Kenichi Ishikawa
Author information
Keywords:
Polishing,
Digital image correlation method,
Polishing pad,
In-plane micro-deformation distribution
Details
