Proceedings of JSPE Semestrial Meeting
2012 JSPE Autumn Conference
Session ID : A83
Conference information

Host: The Japan Society for Precision Engineering

[title in Japanese]
*Takateru Egashira, Toshiro Doi, Syuhei Kurokawa, Osamu Ohnishi, Michio Uneda, Isamu Koshiyama, Daizo Ichikawa
Author information
Keywords: CMP, Difficult-to-machine material, Bell-Jar
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (654K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© 2012 The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top