Proceedings of JSPE Semestrial Meeting
2012 JSPE Autumn Conference
Session ID : A84
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Host: The Japan Society for Precision Engineering

Research of agent-assisted oxidation polishing of single-crystal silicon carbide
*Makoto Sato, Wataru Ohmori, Maiko Takahashi
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Keywords: silicon carbide, oxidation, polishing, seria
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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