Development of high precision Coordinate Measuring Machine (6th report)

Reduction of uncertainty from environment utilizing differential interferometer

Abstract

To develop a high precision Coordinate Measuring Machine called M-CMM, it is important to evaluate stage's kinematic error. In this research, we propose multi-probe method for M-CMM calibration which can separate reference mirror form and kinematic error of stage. In the before papers, we measured the pre-experiment linear stage with three laser interferometers and one autocollimator. In this paper, we reduce uncertainty from environment utilizing differential interferometer and alignment error.