Proceedings of JSPE Semestrial Meeting
2012 JSPE Autumn Conference
Session ID : N44
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Host: The Japan Society for Precision Engineering

Development of a Nanopipette Probe with Micro Sphere for Profile Measurement
Design and Evaluation of the Measuring Instrument
*So Ito, Issei Kodama, Wei Gao
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Keywords: Nanopipette Probe, Profile Measurement, Contact Sensor
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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