2012 JSPE Autumn Conference
Session ID : N45
Conference information
Host: The Japan Society for Precision Engineering
Scanning measurement of 3-dimensional surface based on the laser trapping based probe with the standing wave scale (1st report)
Simplified model for probe sphere motion
Keywords:
Optical radiation pressure,
Micro-probe,
Standing wave,
Laser trapping,
Surface metrology,
Scanning measurement
Details
