Proceedings of JSPE Semestrial Meeting
2012 JSPE Spring Conference
Session ID : M32
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Host: The Japan Society for Precision Engineering

Characterization of chemical reaction in copper-CMP using water soluble fullerenol (1st report)
Development of in-situ Raman spectroscopy
*Kazumasa Kano, Yasuhiro Takaya, Terutake Hayashi, Masaki Michihata, Ken Kokubo
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Keywords: fullerene, polishing, Raman spectroscopy, optical measurement
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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