Multiwavelength-Integrated Local Model Fitting Method for Interferometric Surface Profiling

Proceedings of JSPE Semestrial Meeting

2012 JSPE Spring Conference

Session ID : M33

DOI https://doi.org/10.11522/pscjspe.2012S.0.1027.0

Conference information

Host: The Japan Society for Precision Engineering

Multiwavelength-Integrated Local Model Fitting Method for Interferometric Surface Profiling

*Akihiro Yamashita, Masashi Sugiyama, Katsuichi Kitagawa, Hisashi Kobayashi

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Keywords: interferometry, surface profiling, single-shot, Local Model Fitting, multi-wavelength

CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract

[in Japanese]

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© 2012 The Japan Society for Precision Engineering

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