Proceedings of JSPE Semestrial Meeting
2012 JSPE Spring Conference
Session ID : N39
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Host: The Japan Society for Precision Engineering

Examination of TiNi-SMA thin film actuator design technique for MEMS.
*Kouhei Nishimura, Kazuyoshi Tsuchiya, Yasutomo Uetsuji
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Keywords: Shape memory alloy, Finite element method, Thin film, Actuator
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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