Proceedings of JSPE Semestrial Meeting
2012 JSPE Spring Conference
Session ID : O20
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Host: The Japan Society for Precision Engineering

Non-contact chuck using ultrasonic vibration
On the generation of pulling force
*Shigeka Yoshimoto, Kei Somaya
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Keywords: ultrasonic, vibration, non-contact, chuck, pulling force
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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