Development of transfer device using ultrasonic levitation (2nd report)

Suppression of reflected wave by damper

Abstract

The authors have proposed a two-dimensional transfer method by using ultrasonic levitation and investigated some performance. This report deals with a two-dimensional transfer device terminated with dampers to reduce the reflected wave of the vibration. The speed of a carried plate was decreased. The straightness of the plate path was almost the same between them. In the outside area of the vibration plate, the carried plate moved toward the damper.