2012 JSPE Spring Conference
Session ID : A19
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Host: The Japan Society for Precision Engineering
Infrared ultrafast laser ablation of gold films located on the back on at behind of silicon substrate
*Yuichi Morita, Hiroki Sakashita, Ryosuke Suzuki, Rie Tanabe, Yoshiro Ito, Hidemasa Sakurai, Kozo Tada
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