Proceedings of JSPE Semestrial Meeting
2012 JSPE Spring Conference
Session ID : D06
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Host: The Japan Society for Precision Engineering

Development of Improved Temperature Characteristics of Porous Epoxy Resin Polishing Pads
*Motomu Inazawa, Yasuhiro Tani, Junji Murata, Yu Zhang, Nobuyuki Nomura, Ryouichi Hirokawa
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Keywords: polishing, glass, epoxy resin, urethane resin, Cerium oxides
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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