Study on Effects of Combinations of Slurry Dispersibility and Pad Suface Statuses on Polishing Rates of Glass Based Materials

Abstract

It is possible to control polishing slurry's dispersibility with dispersants for glass materials. Based on experimental results of the controlled dispersibility and polishing performance of polishing slurries, effects of the combinations of the dispersibility and polishing pad surface statuses on polishing performance, and possible polishing mechanism has been studied.