Proceedings of JSPE Semestrial Meeting
2012 JSPE Spring Conference
Session ID : E14
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Host: The Japan Society for Precision Engineering

Synthesis of Diamond Films using Microwave Plasma CVD in Open-air
*Shoji Yahara, Jiro Kawakami, Yusuke Shibata, Hidetsugu Yagi
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Keywords: CVD, Open-Air, Diamond
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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