Proceedings of JSPE Semestrial Meeting
2012 JSPE Spring Conference
Session ID : E13
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Host: The Japan Society for Precision Engineering

Deposition of Silicon Carbide Films by Electron Beam Excited Plasma
*Tatsuya Nishio, Atsushi Hirata
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Keywords: Silicon Carbide films
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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