2012 JSPE Spring Conference
Session ID : F13
Conference information
Host: The Japan Society for Precision Engineering
Development of a High-speed Nanoprofiler using Normal Vector Tracing
Determination of the absolute value of the optical path length using self-calibration
*Takao Kitayama, Daisuke Tonaru, Hiroki Matsumura, Koji Usuki, Takuya Kojima, Junichi Uchikoshi, Katsuyoshi Endo, Yasuo Higashi
Author information
Keywords:
Profiler,
Normal vector,
Absolute measurement,
Optical path length,
Coordinate measuring machine,
Self-calibration
Details
