Proceedings of JSPE Semestrial Meeting
2012 JSPE Spring Conference
Session ID : F16
Conference information

Host: The Japan Society for Precision Engineering

Practical surface profile measurement system for precision surface plates of large area
*Akifumi Shoji, Katsunori Ikeuchi, Masahiro Yoshida, Kazuhisa Yanagi, Satoshi Kiyono
Author information
Keywords: surface profile measurement, three-point method, large area
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (439K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© 2012 The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top