Proceedings of JSPE Semestrial Meeting
2012 JSPE Spring Conference
Session ID : F15
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Host: The Japan Society for Precision Engineering

Profile Measuring Instrument Based on Extended Laser Auto-Collimation Method (3rd Report)
Correcting for Posture Error of Sample Stage and Improvement of Resolution
*Masahiro Shiomi, Hiroki Shimizu, Yuuma Tamaru
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Keywords: Laser auto-collimation, Angle sensor, Profile measurement, Normal angle, Optical device
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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