Proceedings of JSPE Semestrial Meeting
2012 JSPE Spring Conference
Session ID : F23
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Host: The Japan Society for Precision Engineering

New concept of nanometer-level wafer-defect inspection by contact-type micro thermal sensor
*Yuki Shimizu, Wenjian Lu, Toyohiro Azuma, Wei Gao
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Keywords: Contact sensor, Frictional heat, Nano metrology
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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