Proceedings of JSPE Semestrial Meeting
2012 JSPE Spring Conference
Session ID : F31
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Host: The Japan Society for Precision Engineering

Development of a 3-D Micro Measurement system Using a Vibrating Fiber Stylus
*Hiroshi Murakami, Akio Katsuki, Takao Sajima, Tatsunori Yamamoto
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Keywords: Micro CMM, Optical fiber, Vibrating fiber stylus, Measurement, Micro hole, Micro and nano structure
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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