Proceedings of JSPE Semestrial Meeting
2012 JSPE Spring Conference
Session ID : F61
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Host: The Japan Society for Precision Engineering

A study on short-wavelength measurement limit for surface texture measuring instruments by optical methods
*Akihiro Fujii, Kazuhisa Yanagi
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Keywords: surface texture, amplitude response
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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