Proceedings of JSPE Semestrial Meeting
2012 JSPE Spring Conference
Session ID : F62
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Host: The Japan Society for Precision Engineering

Study on digital filters for Si wafer surface profile measurement
Design of digital filter by total variation
*Hirotaka Ojima, Kazutaka Nonomura, Libo Zhou, Jun Shimizu, Teppei Onuki
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Keywords: total variation, surface profile measurement, digital filter, denoising
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Abstract
[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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