Proceedings of JSPE Semestrial Meeting
2012 JSPE Spring Conference
Session ID : F63
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Host: The Japan Society for Precision Engineering

Standard for CD(Critical Dimension) Measurement
Uncertainty Evaluation of Line Width Measurement Using Metal Coating
*Haruki Okito, Satoru Takahashi, Kiyoshi Takamasu
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Keywords: Semi-conductor, Line Width, Sub-nanometer, Uncertainty, STEM
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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