Proceedings of JSPE Semestrial Meeting
2012 JSPE Spring Conference
Session ID : F79
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Host: The Japan Society for Precision Engineering

Diffraction efficiency evaluation on ultrahigh precision machine tool
*Shinya Morita, Yutaka Yamagata
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Keywords: Ultrahigh precision cutting, Diffraction grating, On-machine measurement
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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