Fabrication of a blazed grating using a ultrahigh precision machine tool and its assessment

Abstract

This study describes a fabrication of blazed gratings using a 5 axis ultrahigh precision machine tool. Traditionally, blazed gratings have been fabricated by burnishing method with ruling engine. Recently microgrooves on free curve surface were fabricated by 5 axis ultrahigh precision machine tool. This paper reports the result of fabrication experiments of blazed gratings using a 5 axis ultrahigh precision machine tool with single crystalline diamond cutting tool and single crystalline diamond burnishing tool. Compared with blazed gratings fabricated by ruling engine, diffraction efficiency and stray light of blazed gratings fabricated by 5 axis ultrahigh precision machine tool with cutting method was improved.