Study on nano dots formation by thermal dewetting and transfer to plastic films

Abstract

This paper presents a simplified method to fabricate ordered, metal nano dot arrays by combination of nano plastic forming, coating, thermal dewetting, and transferring nano dot arrays to plastic substrates. The shape and contact angle of the dots on master substrate are the key factors for successfully transferring to plastic substrates. The effects of process parameters such as substrate material, metal deposition thickness, annealing temperature, annealing time, etc. on the formation of nano dot on master substrate and then transfer the dot to PDMS films are systematically investigated.