Proceedings of JSPE Semestrial Meeting
2012 JSPE Spring Conference
Session ID : I06
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Host: The Japan Society for Precision Engineering

Fundamental study of a MEMS actuator driven by magnetic fluid sealed with polyimide diaphragms
*Yuhei Okubo, Hiro Ota, Kazuki Syoji, Satomitsu Imai
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Keywords: MEMS, Magnetic fluid, Polyimide, Diaphragm, Actuator
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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