Proceedings of JSPE Semestrial Meeting
2012 JSPE Spring Conference
Session ID : I07
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Host: The Japan Society for Precision Engineering

Driving method and Displacement Properties of a Thin Film Polyimide Diaphragm for a MEMS Actuator
*Shinichiro Mifuji, Koji Adachi, Tatsunori Tsukioka, Satomitsu Imai
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Keywords: Polyimide, Diaphragm, Thin-film, Actuator, MEMS
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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