Deformation Analysis for Glass Substrate on Air Conveyer System and Its Experimental Verification

Abstract

Handling devices have been developed for liquid crystal display fabrication that are equipped with aerostatic bearing pads to feed large glass substrates in a non-contact state. Our aim was to investigate the deformation behavior of glass substrates on aerostatic bearing pads. The deformation behavior of glass sheets on air film were investigated numerically using the compressible Reynolds equation and Timoshenko's thin plate theory. Numerical and experimental results showed almost the same trend.