Proceedings of JSPE Semestrial Meeting
2012 JSPE Spring Conference
Session ID : J34
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Host: The Japan Society for Precision Engineering

Fabrication of a nonwarped wafer by polishing (1st Report)
Deformation and peeling characteristics caused by solidification for a freezing pin chuck
*Katsunori Takehana, Atsunobu Une, Kenichiro Yoshitomi, Masaaki Mochida
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Keywords: freezing pin chuck, freezing fixing, tensile force, shearing force, finite element method, freezing liquid
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Abstract
[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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