CMP and Electric Field Assisted CMP of Aluminum Alloy for High Pressure Hydrogen Fuel Tank System

Abstract

Aluminum alloy tank winded with CFRP (Carbon Fiber Reinforced Plastic) is expected to apply in a new generation high pressure hydrogen fuel tank system. When manufacturing the aluminum alloy tank, cracks are easily formed inside the tank because of the drawing process. Therefore, it is important to polish the inner surface of aluminum alloy tank; however, no effective inner surface polishing methods have been established because of the shape of tank. This paper discusses the polishing characteristics (removal rate) of CMP and electric field assisted CMP of the aluminum alloy using the commercially slurry for fundamental examination. As a result, the removal rate increases with the increase of applied pressure, and the electric field assisted CMP is one of the effective method under the low pressure polishing.