2012 JSPE Spring Conference
Session ID : J38
Conference information
Host: The Japan Society for Precision Engineering
Study on Sapphire CMP slurries using fullerenol as fine particles
Consideration of material removal mechanism
*Takashi Saito, Keisuke Suzuki, Khajornrungruang Panart, Erika Karasudani, Keiichi Kimura
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