Proceedings of JSPE Semestrial Meeting
2012 JSPE Spring Conference
Session ID : J43
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Host: The Japan Society for Precision Engineering

Structure analysis of polishing pads by the X-ray CT scan
*Naoko Kawai, Hiroyuki Nakano, Yasuyuki Itai
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Keywords: Polishing pad, X-ray CT scan
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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