Proceedings of JSPE Semestrial Meeting
2013 JSPE Autumn Conference
Session ID : B69
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Host: The Japan Society for Precision Engineering

Speed control of water driven stage developed for diamond turning
*Yohichi Nakao, Yusuke Torii, Kenji Suzuki
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Keywords: Micro ultra-precision machining systems, Water hydraulic systems, Speed control
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[in Japanese]
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© 2013 The Japan Society for Precision Engineering
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