Proceedings of JSPE Semestrial Meeting
2013 JSPE Autumn Conference
Session ID : D04
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Host: The Japan Society for Precision Engineering

Development of a XY-Stage by Giant Magnetostrictive Alloys
*Shigeto Ogino, Akira Asami
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Keywords: giant magnetostrictive alloys, actuator, stage
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[in Japanese]
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© 2013 The Japan Society for Precision Engineering
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