Proceedings of JSPE Semestrial Meeting
2013 JSPE Autumn Conference
Session ID : E20
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Host: The Japan Society for Precision Engineering

[title in Japanese]
*Yuta Araki, Kenichiro Horio, Junichi Kaneko, Tsugio Yamasaki
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Keywords: Double sided polishing, Lapping, Motion measurement, Acceleration, Angular velocity
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[in Japanese]
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© 2013 The Japan Society for Precision Engineering
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