Study on Some Factors that Affect the Improvement in Removal Rates by means of Ceria Dispersibility Control in Polishing Slurry for Glass Based Materials

Abstract

Improvement in Removal Rates and Possibility of reducing abrasive usage by controlling the dispersibility of polishing slurry for glass based materials was reported previously. In this research, some factors, such as abrasive particles size, abrasive concentrations, pad types, pre-polishing surface statuses of work pieces, were studied for their effects on improvement in removal rates.