Proceedings of JSPE Semestrial Meeting
2013 JSPE Autumn Conference
Session ID : F04
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Host: The Japan Society for Precision Engineering

Microfabrication of gold thin film on backside of a Si substrate by an infrared femtosecond laser
*Mitsuru Uewada, Daiki Kataoka, Rie Tanabe, Yoshiro Ito
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Keywords: Silicon, Infrared femtosecond laser, Microfabrication, Gold thin film
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[in Japanese]
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© 2013 The Japan Society for Precision Engineering
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