Proceedings of JSPE Semestrial Meeting
2013 JSPE Autumn Conference
Session ID : G38
Conference information

Host: The Japan Society for Precision Engineering

Investigation of Noncontact Support in Shape Measurement of Large-Diameter Silicon Wafer
*Yukihiro Ito, Wataru Natsu, Masanori Kunieda
Author information
Keywords: Silicon wafer, Shape measurement, Warp, Noncontact support
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (392K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© 2013 The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top