Abstract
Shadow moiré method can use a fine grating by setting the grating near an object, and it can measure three-dimensional shape with high accuracy. By combining with a phase shifting method, it is quantitatively analyzable with high accuracy. Furthermore, by combining phase-shifting method using light stepping method with LED light sources, the phase-shifting can be performed at high speed because of no use of movable parts. As a result, it provides a high-speed and highly accurate three-dimensional shape measurement system. The feature of the system and the know-how of the development are described.
