2013 JSPE Autumn Conference
Session ID : I09
Conference information
Host: The Japan Society for Precision Engineering
Effect on vertical straightness for stacked piezoelectric actuator
*Akira Sakurada, Ryou Arakawa, Shigeki Mori, Akihiro Naganawa, Yotsugi Shibuya, Goro Obinata
Author information
Keywords:
stacked piezoelectric element,
positioning accuracy,
scanning probe microscopy,
vertical straightness
Details
