Proceedings of JSPE Semestrial Meeting
2013 JSPE Autumn Conference
Session ID : I19
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Host: The Japan Society for Precision Engineering

Study of tool positioning on workpieces for nano machining
*Kazuya Takeuchi, Kenta Nakatani, Tohru Sasaki, Haruki Obara, Yusuke Ikemoto, Mitsuru Jindai
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Keywords: positioning, nano-order, proximity sensor
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[in Japanese]
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© 2013 The Japan Society for Precision Engineering
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