Proceedings of JSPE Semestrial Meeting
2013 JSPE Autumn Conference
Session ID : K04
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Host: The Japan Society for Precision Engineering

Deliberation of crystal growth of thin film effected by the rate of lattice mismatch
*Kei Ito, Kazuyosi Tsuchiya, Yasutomo Uetsuji
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Keywords: Crystal growth, Lattice mismatch program, Sputtering
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[in Japanese]
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© 2013 The Japan Society for Precision Engineering
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