2013 JSPE Autumn Conference
Session ID : K24
Conference information
Host: The Japan Society for Precision Engineering
High rate deposition of ZnO thin films using atmospheric-pressure radio-frequency plasma
Influence of working parameters on the growth of ZnO films
*Masaru Nagashima, Yusuke Mizuno, Takahiro Yamada, Hiromasa Ohmi, Hiroaki Kakiuchi, Kiyoshi Yasutake
Author information
Keywords:
zinc oxide
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