Proceedings of JSPE Semestrial Meeting
2013 JSPE Autumn Conference
Session ID : L67
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Host: The Japan Society for Precision Engineering

Planarization for functional materials by catalyst-referred etching
*Wataru Yamaguchi, Shun Sadakuni, Ai Isohashi, Hiroya Asano, Yasuhisa Sano, Kazuto Yamauchi
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Keywords: Ultra precision polishing, Planarization, Nano-scale
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[in Japanese]
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© 2013 The Japan Society for Precision Engineering
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